Engineering Research Center for Environmentally Benign Semiconductor Manufacturing (ERC)
ERC, sponsored by the Semiconductor Research Corporation and SEMATECH, is developing the science, technology and educational methods needed to lead the semiconductor industry on environmental issues. The UA leads this consortium of six institutions (UA, MIT, Stanford University, UC Berkeley, Cornell University, and ASU) in a unique interdisciplinary collaboration to develop environmentally friendly manufacturing processes and tools for the semiconductor industry.
TRIF-funded programs at ERC have included:
- Initiating a joint project with ST Microelectronics in Phoenix (the second largest IC manufacturer in the world) on water use optimization and low-water rinse technology.
- A joint project with ASU on the development of low-water wafer cleaning that uses 85% of the water in IC industry.
- Development of a new low-energy water purification method for removing organics and hardness-causing species.
- Initiated interactions for transfer of water use optimization results with Texas Instruments, Motorola, and Intel in Arizona.
- Held two knowledge transfer and educational seminars related to water use in Arizona semiconductor and high-technology industries for practicing professionals in Arizona.
Click here to visit the ERC website.
Contact Kim Ogden ; 520-621-9484 for more information about the ERC.